Temperature control range | 18 - 26℃ | Dust particle(≥ 5μm) | ≤ 20000 |
Humidity control range | 45%- 65%RH | Space ozone disinfection concentration | ≥ 10ppm |
Humidity control range | ≥ 15times | Sedimentation bacteria | ≤ 10cfu/ dish |
Differential pressure for non-clean areas | ≥ 10Pa | Phytoplankton | ≤ 500cfu/ m³ |